DocumentCode
3455849
Title
Laser shock removal of nanoparticles from Si capping layer of EUV mask
Author
Lee, Sang-Ho ; Kang, Young-Jae ; Park, Jin-Goo ; Busnaina, A.A. ; Lee, Jong-Myung ; Kim, Tae-Hoon
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
288
Lastpage
289
Keywords
Chemical lasers; Cleaning; Electric shock; Fluorescence; Lithography; Nanoparticles; Optical filters; Optical microscopy; Particle measurements; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245656
Filename
1459590
Link To Document