DocumentCode
3455871
Title
Development of the fabrication platforms for MEMs technology
Author
Fang, Weileun ; Hsieh, Jenvei ; Lin, Hung-Yi ; Wu, Mingching ; Chu, Huai-Yuan
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
292
Lastpage
293
Keywords
Etching; Fabrication; Microelectromechanical devices; Micromechanical devices; Optical attenuators; Optical films; Optical switches; Silicon; Substrates; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245658
Filename
1459592
Link To Document