• DocumentCode
    3455948
  • Title

    Fabrication of nano-manipulator with SiO2/DLC hetero-structure by focused-lon-beam chemical-vapor-deposition

  • Author

    Kometani, Reo ; Hoshino, Takayulu ; Nakamatsu, Ken-Iciro ; Kondo, Kamshige ; Kanda, Kazuhro ; Haruyama, Y. ; Kaito, Takashi ; Fujita, Jun-ichi ; Ichihashi, Tosl-Hari ; Ochiai, Yukinori ; Matsui, Shinji

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    296
  • Lastpage
    297
  • Keywords
    Chemicals; Conductivity; Dielectrics and electrical insulation; Electric resistance; Electric variables; Electric variables measurement; Electrostatics; Fabrication; Fingers; Focusing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245660
  • Filename
    1459594
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3455948