DocumentCode
3455972
Title
Growth of cobalt nano column arrays directly on Si[111] substrate using AAO template
Author
Shimizu, T. ; Nagayanagi, M. ; Hao, T. ; Sakaue, H. ; Takahagi, T. ; Shingubara, S.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
298
Lastpage
299
Keywords
Aluminum; Annealing; Argon; Cobalt; Crystallization; Etching; Hafnium; Magnetic anisotropy; Oxidation; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245661
Filename
1459595
Link To Document