Title :
Fully monolithic MEMS based thermal sensor in 22 nm CMOS technology for SoC thermal managemet
Author :
Mahameed, R. ; Abdelmoneum, M. ; Duarte, Duarte ; Taylor, Gareth ; Choi, Sung-Jin ; Brain, R. ; Morrow, Philip ; Fischer, P.
Author_Institution :
Intel Archit. Group, Hillsboro, OR, USA
Abstract :
A novel fully monolithic MEMS based thermal sensor for high resolution thermal management is demonstrated in a 22 nm CMOS technology. Top metal layers are used as the structural material for the MEMS clamped-clamped beam resonators used as a thermal sensor. Using the top metal layers avoids any disruption to the complex fin FET transistor front end where the MEMS technology is not really compatible and additionally exploits the thermal characteristics of the device [1-2]. By tracking the resonance frequency of the copper resonator, the temperature of the chip can be tracked to a sub degree granularity with frequency resolution of 6.7 kHz/°C at 15 MHz.
Keywords :
CMOS integrated circuits; field effect transistors; micromechanical resonators; microsensors; monolithic integrated circuits; system-on-chip; temperature sensors; thermal management (packaging); CMOS technology; MEMS clamped-clamped beam resonator; SOC; complex fin FET transistor front end; frequency 15 MHz; metal layer; monolithic MEMS based thermal sensor; resonance frequency tracking; size 22 nm; structural material; thermal characteristics; thermal management; CMOS integrated circuits; Laser beams; Measurement by laser beam; Metals; Micromechanical devices; Temperature sensors; Metal MEMS; RF Resonators; Resonant Sensors; Thermal Sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626871
