DocumentCode :
3456087
Title :
Improved spray coating of photoresist for three-dimensional photolithography over deep structure
Author :
Singh, Vijay Kumar ; Sasaki, Minoru ; Watanabe, Yoshihiko ; Kawakita, Masato ; Hayashi, Hiroki ; Hane, Kazuhiro
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
306
Lastpage :
307
Keywords :
Anisotropic magnetoresistance; Coatings; Lithography; Optical device fabrication; Optical fibers; Resists; Silicon; Spraying; Temperature; Thickness measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245665
Filename :
1459599
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3456087
