DocumentCode :
3456129
Title :
Selective organic dielectric deposition for encapsulation of MEMS structure
Author :
Sakata, Tomomi ; Ishii, Hiromu ; Okabe, Yuichi ; Nagase, Masao ; Yano, Masaki ; Kudou, Kazuhisa ; Kamei, Toshikazu ; Machida, Katsuyuki
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
308
Lastpage :
309
Keywords :
Atomic force microscopy; Dielectrics; Encapsulation; Gold; Micromechanical devices; Microstructure; Optical films; Optical microscopy; Surface morphology; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245666
Filename :
1459600
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3456129
