مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

3456160

Title :

Latest development status of MAPPER

Author :

Kruit, P. ; Wieland, M.J.

fYear :

2004

fDate :

Oct. 27-29, 2004

Firstpage :

310

Lastpage :

311

Keywords :

Data systems; Electron beams; Electron optics; Electron sources; Lenses; Lithography; Optical arrays; Resists; System testing; Throughput;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN :

4-99024720-5

Type :

conf

DOI :

10.1109/IMNC.2004.245667

Filename :

1459601

Link To Document :