DocumentCode :
3456167
Title :
Pyroelectric electron emission from a thin film of PbZrxTi1−xO3 on a nanofabricated cathode
Author :
Fletcher, P.C. ; Mangalam, R.V.K. ; Martin, L.W. ; King, William P.
Author_Institution :
Dept. of Mech. Sci. & Eng., Univ. of Illinois, Urbana, IL, USA
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
772
Lastpage :
775
Abstract :
We report pyroelectric emission from thin films of crystalline PbZr0.8Ti0.2O3 (PZT) on nanometer-sharp tips. The epitaxial PZT films are 30 nm thick and grown directly on batch fabricated single-crystal silicon tips. Pyroelectric emission occurs for heating rates ≥ 50 °C/min in a 20 V/μm external field, and for electric field strengths ≥ 6.7 V/μm when heated at 100 °C/min. The emitted electric charge is reasonable when compared to the theoretical maximum charge for this PZT film and these testing parameters. We calculate that a heating rate of 4.0×107 °C/min is necessary for unassisted pyroelectric emission.
Keywords :
electron field emission; epitaxial layers; heat treatment; lead compounds; nanostructured materials; pyroelectricity; PbZr0.8Ti0.2O3; crystalline PZT thin films; electric field strengths; epitaxial PZT films; heating rates; nanofabricated cathode; nanometer-sharp tips; pyroelectric electron emission; Anodes; Cathodes; Electric fields; Electron emission; Films; Resistance heating; PZT; Pyroelectric; electron emission; tip array;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6626880
Filename :
6626880
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3456167
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