مرکز منطقه ای اطلاع رساني علوم و فناوري - High throughput electron beam recorder with arrayed microcolumns

DocumentCode :

3456226

Title :

High throughput electron beam recorder with arrayed microcolumns

Author :

Kim, Hak S. ; Kim, D.W. ; Ahn, S.J. ; Kim, Y.C. ; Seol, M.H.

fYear :

2004

fDate :

Oct. 27-29, 2004

Firstpage :

314

Lastpage :

315

Keywords :

Assembly; Cities and towns; DVD; Electron beams; Electron optics; High speed optical techniques; Lithography; Optical recording; Physics; Throughput;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN :

4-99024720-5

Type :

conf

DOI :

10.1109/IMNC.2004.245669

Filename :

1459603

Link To Document :