DocumentCode
3456359
Title
Fabrication of hfc coated Si field emitter arrays with a built-in poly-Si TFT
Author
Nagao, M. ; Sacho, Y. ; Kanemaru, S. ; Matsukawa, T. ; Itoh, J.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
326
Lastpage
327
Keywords
Active matrix technology; Argon; Fabrication; Field emitter arrays; Flat panel displays; Glass; Hybrid fiber coaxial cables; Niobium; Temperature; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245628
Filename
1459609
Link To Document