Multi-force-field assisted self-assembly process of thermoelectric device

Author

Lin, Y.B. ; Tzeng, Y.L. ; Dai, M.J. ; Liu, C. Karen ; Liao, L.L. ; Chien, H.C. ; Chen, Y.S. ; Wang, Kangping

Author_Institution

Nat. Changhua Univ. of Educ., Changhua, Taiwan

fYear

2013

fDate

16-20 June 2013

Firstpage

818

Lastpage

821

Abstract

This study presents a dynamic multi-force field platform for micro thermoelectric generator (μTEG) assembly. The platform consists of a guide template and an alignment template. The dynamic force fields are provided by gravitational force and magnetic force. The thermolegs are confined by an anti-static ITO cubical well. Without using any redundant thermolegs, the assembly process can achieve 100% yield within 13 minutes. P-type and N-type TEG legs are assembled and transferred to the top and bottom electrodes, respectively. After hot pressing, a 6×6 and a 10×10 Bi_2+xTe_3-x μTEG array are packaged for testing. The TEG array generates a power of 1.29 mW for a ΔT of 65.9°C under optimized external load of 22.3 Ohm.

Keywords

bismuth compounds; micromechanical devices; self-assembly; semiconductor materials; thermoelectric conversion; Bi_2+xTe_3-x; N-type TEG legs; P-type TEG legs; alignment template; anti-static ITO cubical well; dynamic multiforce field platform; gravitational force; guide template; hot pressing; magnetic force; microthermoelectric generator assembly; multiforce-field assisted self-assembly process; power 1.29 mW; resistance 22.3 ohm; thermoelectric device; time 13 min; Arrays; Assembly; Electrodes; Generators; Heating; Self-assembly; Substrates; TEG; Thermoelectric power generation; force field; generator; self-assembly; thermoelectricity;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626892

Filename

6626892