DocumentCode
3456412
Title
Fabrication of micro field emitter tip using ion-bearn irradiation-induced self-standing of thin film
Author
Yoshida, Tomoya ; Baba, Akiyoshi ; Asano, Tanemasa
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
328
Lastpage
329
Keywords
Anodes; Fabrication; Lithography; Microelectronics; Phosphors; Scanning electron microscopy; Sputter etching; Substrates; Tensile stress; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245629
Filename
1459610
Link To Document