Self-standing printed humidity sensor with thermo-calibration and integrated heater

Author

Vasquez Quintero, Andres ; Molina-Lopez, Francisco ; Mattana, G. ; Briand, Danick ; de Rooij, Nico F.

Author_Institution

STI IMT SAMLAB, Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland

fYear

2013

fDate

16-20 June 2013

Firstpage

838

Lastpage

841

Abstract

In this work we report on a self-standing parallel-plate capacitive humidity sensor on a thin dry photoresist film with integrated resistive temperature sensor and heater on each electrode, respectively. The simple concept proposes dry photoresist film as substrate but also as dielectric humidity sensing layer. The characteristics of the temperature sensor (TCR ~900 ppmK^-1), resistive heater (0.65 °C/mW) and humidity sensor (response time ~230 seconds, sensitivity ~23 fF / 1%R.H) were measured and are reported. FEM simulations were used to visualize the temperature distribution generated by the integrated heater.

Keywords

calibration; capacitance measurement; capacitive sensors; dielectric devices; electrodes; finite element analysis; humidity measurement; humidity sensors; photoresists; temperature distribution; temperature measurement; temperature sensors; thin film sensors; FEM simulation; dielectric humidity sensing layer; electrode; integrated resistive heater; integrated resistive temperature sensor; self-standing parallel-plate capacitive humidity sensor; self-standing printed humidity sensor; temperature distribution; thermocalibration; thin dry photoresist film; Capacitance; Electrodes; Films; Heating; Humidity; Temperature measurement; Temperature sensors; Capacitive humidity sensor; dry photoresist film; inkjet printing; integrated heater; temperature sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626897

Filename

6626897