A high-Q bulk-resonator equipped with ultra-sensitive mesoporous nano-material for detection of trace-level chemicals

Author

Feng Yu ; Haitao Yu ; Pengcheng Xu ; Tiegang Xu ; Chen Yang ; Xinxin Li

Author_Institution

State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf., Shanghai, China

fYear

2013

fDate

16-20 June 2013

Firstpage

842

Lastpage

845

Abstract

The paper presents a novel I-shaped bulk-resonating chemical sensor that is operated in high-Q in-plane mode. With - COOH functionalized mesoporous silica sensing material prepared and loaded onto the sensing regions, the resonant chemical-sensor performs a highly sensitive detection to trace-level ammonia vapor of 1ppm. In addition, a very linear relationship between sensing response and vapor concentration is tested.

Keywords

ammonia; chemical sensors; mesoporous materials; microsensors; nanostructured materials; silicon compounds; -COOH functionalized mesoporous silica sensing material; I-shaped bulk-resonating chemical sensor; NH₃; SiO₂; high-Q bulk-resonator; high-Q in-plane mode; sensing response; trace-level ammonia vapor; trace-level chemical detection; ultra-sensitive mesoporous nanomaterial; vapor concentration; Chemicals; Mesoporous materials; Q-factor; Resonant frequency; Sensitivity; Sensors; Silicon compounds; I-shaped; Micro-cantilever; bulk resonator; high-Q; in-plane mode; trace ammonia sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626898

Filename

6626898