Title :
A high-Q bulk-resonator equipped with ultra-sensitive mesoporous nano-material for detection of trace-level chemicals
Author :
Feng Yu ; Haitao Yu ; Pengcheng Xu ; Tiegang Xu ; Chen Yang ; Xinxin Li
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf., Shanghai, China
Abstract :
The paper presents a novel I-shaped bulk-resonating chemical sensor that is operated in high-Q in-plane mode. With - COOH functionalized mesoporous silica sensing material prepared and loaded onto the sensing regions, the resonant chemical-sensor performs a highly sensitive detection to trace-level ammonia vapor of 1ppm. In addition, a very linear relationship between sensing response and vapor concentration is tested.
Keywords :
ammonia; chemical sensors; mesoporous materials; microsensors; nanostructured materials; silicon compounds; -COOH functionalized mesoporous silica sensing material; I-shaped bulk-resonating chemical sensor; NH3; SiO2; high-Q bulk-resonator; high-Q in-plane mode; sensing response; trace-level ammonia vapor; trace-level chemical detection; ultra-sensitive mesoporous nanomaterial; vapor concentration; Chemicals; Mesoporous materials; Q-factor; Resonant frequency; Sensitivity; Sensors; Silicon compounds; I-shaped; Micro-cantilever; bulk resonator; high-Q; in-plane mode; trace ammonia sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626898
