DocumentCode
3457003
Title
Frequency Trimming for MEMS Resonator Oscillators
Author
Hsu, Wan-Thai ; Brown, Andrew R.
Author_Institution
Discera Inc., Ann Arbor
fYear
2007
fDate
May 29 2007-June 1 2007
Firstpage
1088
Lastpage
1091
Abstract
This paper presents various frequency trimming methodologies with the focus on silicon based micromechanical resonators. The techniques include mechanical trimming and pure electronic trimming. The experimental results showed the frequency accuracy have reached 2.6 ppm for mechanical trimming and lppm for electronic trimming. Furthermore, the technique of digital electronic trimming resolved the temperature compensation issues for MEMS resonators at the same time.
Keywords
microcavities; micromechanical resonators; oscillators; MEMS resonator oscillators; electronic trimming; frequency trimming; mechanical trimming; silicon based micromechanical resonators; Band pass filters; Circuits; Clocks; Crystals; Micromechanical devices; Optical materials; Oscillators; Phase locked loops; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location
Geneva
ISSN
1075-6787
Print_ISBN
978-1-4244-0646-3
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2007.4319247
Filename
4319247
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