DocumentCode
3457040
Title
Carbon nanotube in situ TEM large strain and chiral angle analysis enabled by modular coupon and MEMS test platform system
Author
Brown, J.J. ; Muoth, M. ; Hierold, C. ; Bright, V.M.
Author_Institution
Dept. of Mech. Eng., Univ. of Colorado, Boulder, CO, USA
fYear
2013
fDate
16-20 June 2013
Firstpage
944
Lastpage
947
Abstract
A modular MEMS-based test platform enables straining of pristine carbon nanotubes inside a transmission electron microscope. The interchangeable coupon is compatible with the high-temperature environment of nanostructure synthesis whereas the metal leads of the micro actuator are not exposed to the harsh synthesis conditions. The actuator of the universal test platform translates its large displacement onto the shuttle of the coupon where the as-grown carbon nanotubes are strained and simultaneously observed by the electron beam passing through the backside hole. Electron diffraction enables assignment of nanotube chirality.
Keywords
carbon nanotubes; electron beams; electron diffraction; microactuators; microfabrication; transmission electron microscopy; C; carbon nanotube in situ TEM large strain; chiral angle analysis; electron beam passing; electron diffraction; harsh synthesis condition; interchangeable modular coupon; microactuator; microfabrication; modular MEMS-based test platform system; nanostructure synthesis; transmission electron microscope; Actuators; Carbon nanotubes; Diffraction; Fabrication; Micromechanical devices; Microscopy; Strain; Carbon nanotubes; electron diffraction; microactuator; strain; tensile test; transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6626924
Filename
6626924
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