Radio-frequency and DC electrical characterization on a modular MEMS mechanical test platform for nanomaterials

Author

Brown, J.J. ; Wallis, T.M. ; Kabos, P. ; Bertness, K.A. ; Sanford, N. ; Bright, V.M.

Author_Institution

Dept. of Mech. Eng., Univ. of Colorado, Boulder, CO, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

948

Lastpage

951

Abstract

In order to enable radio frequency (RF) data collection from a micromechanical system designed to strain nanomaterials, a coplanar electrical waveguide has been integrated with an actuated microscale stage. RF (100 MHz to 20 GHz) admittance measurements obtained from this device demonstrate that the capacitance of an empty test stage decreases from 0.87 fF to 0.78 fF as the stage gap increases. Direct current (DC) photoconduction measurements demonstrate successful electrical interfacing to a suspended GaN nanowire (NW) that was placed on the stage by dielectrophoretic self-assembly.

Keywords

III-V semiconductors; capacitance measurement; electric properties; electrophoresis; gallium compounds; materials testing; mechanical testing; micromechanical devices; microwave measurement; nanowires; photoconductivity; test equipment; wide band gap semiconductors; DC electrical characterization; GaN; actuated microscale stage; admittance measurement; capacitance measurement; coplanar electrical waveguide; dielectrophoretic self-assembly; direct current photoconduction measurements; electrical interfacing; micromechanical system; modular MEMS mechanical test platform; nanomaterial strain; nanomaterial test platform; radio frequency characterization; radio frequency data collection; suspended nanowire; Conductors; Coplanar waveguides; Nanomaterials; Optical waveguides; Probes; Radio frequency; MEMS testers; coplanar waveguide; radio-frequency; test platform;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626925

Filename

6626925