Title :
High Overtone Bulk Acoustic Resonators Based on Thinning Single-crystal Piezoelectric Layers
Author :
Gachon, D. ; Courjon, E. ; Masson, J. ; Guichardaz, B. ; Ballandras, S.
Author_Institution :
FEMTO-ST Inst., Besancon
fDate :
May 29 2007-June 1 2007
Abstract :
Bulk acoustic waves excited in thin piezoelectric films have revealed their capabilities for addressing the problem of high frequency RF filters (above 1 GHz). In this paper, we propose an alternative to thin film deposition consisting in single crystal wafers bonded on a substrate (for instance silicon) and thinned, allowing for plate thickness close to 10 mum. This has been achieved on 3 inches wafers and allows for an accurate selection of the wave characteristics. More, the properties of the piezoelectric material are found conform with tabulated values, enabling one to reliably design any passive signal processing device.
Keywords :
acoustic resonators; crystal filters; piezoelectric materials; piezoelectric thin films; radiofrequency filters; wafer bonding; bulk acoustic resonator; crystal wafer bonding; high frequency RF filter; passive signal processing device design; piezoelectric material properties; thin film deposition; thinning single-crystal piezoelectric layer; Acoustic waves; Materials reliability; Piezoelectric films; Piezoelectric materials; Radio frequency; Resonator filters; Silicon; Sputtering; Substrates; Wafer bonding;
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2007.4319257
