Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing

Author

Kottapalli, Ajay Giri Prakash ; Asadnia, Mohsen ; Miao, J.M. ; Triantafyllou, Michael S.

Author_Institution

Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore

fYear

2013

fDate

16-20 June 2013

Firstpage

976

Lastpage

979

Abstract

This paper presents the fabrication and testing of a bio-inspired polymer MEMS flow sensor. The sensor consists of a liquid crystal polymer (LCP) sensing membrane and a polymer haircell that extends into the flow. High-aspect ratio Si60 polymer haircells are fabricated by stereolithography. The device demonstrates high sensitivity in the air and water flow velocity sensing tests that are conducted.

Keywords

bio-inspired materials; biomimetics; flow sensors; liquid crystal polymers; membranes; microfabrication; microsensors; stereolithography; velocity measurement; LCP; air flow velocity sensor; bioinspired polymer MEMS flow sensor; biomimetic polymer MEMS haircell; high-aspect ratio Si60 polymer haircell; liquid crystal polymer sensing membrane; stereolithography; water flow velocity sensor; Biomembranes; Marine animals; Micromechanical devices; Polymers; Robot sensing systems; Silicon; Bio-inspiration; haircell; liquid crystal polymer; polymer MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626932

Filename

6626932