Title :
Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications
Author :
Asadnia, Mohsen ; Kottapalli, Ajay Giri Prakash ; Miao, J.M. ; Randles, A.B. ; Tsai, Julius Minglin
Author_Institution :
Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
In an effort to improve the understanding of the behavior of PZT-based MEMS pressure sensor at high temperature and high pressure conditions, a PZT (0.52/0.48) circular microdiaphragm pressure sensor is developed. The proposed sensor is characterized for high temperatures (390°C) and under oscillatory pressure.
Keywords :
diaphragms; lead compounds; microsensors; piezoelectric devices; pressure sensors; MEMS pressure sensor; PZT; circular microdiaphragm pressure sensor; high temperature sensing application; oscillatory pressure; performance analysis; pressure sensing application; temperature 390 C; Ceramics; Electrodes; Resonant frequency; Temperature; Temperature measurement; Temperature sensors; High temperature sensing; Piezoelectric material characterization; Piezoelectric sensors; low frequency sensing;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626934
