Batch fabricated flexible tactile sensor based on carbon nanotube-polymer composites

Author

Pyo, Soonjae ; Lee, Jin-Il ; Kim, Min-Oh ; Chung, Taeyoung ; Oh, Yisok ; Lim, Sang-Chul ; Park, Jongho ; Kim, Jung-Ho

Author_Institution

Sch. of Mech. Eng., Yonsei Univ., Yonsei, South Korea

fYear

2013

fDate

16-20 June 2013

Firstpage

1004

Lastpage

1007

Abstract

We developed a batch-processed, flexible tactile sensor using carbon nanotube (CNT)-polymer composites. The fabricated sensor consists of a flexible substrate (polyimide), four flexible sensing parts (CNT-polymer composites) and a bump structure (SU-8). CNT-polymer composite was patterned on polyimide substrate through large area screen printing process. The proposed sensor structure has advantages in high sensitivity, mechanical flexibility and facile fabrication process. It showed outstanding piezoresistive characteristics in the pressure range up to 2 N.

Keywords

carbon nanotubes; composite materials; polymers; tactile sensors; CNT-polymer composites; batch fabricated flexible tactile sensor; bump structure; carbon nanotube-polymer composites; facile fabrication process; four flexible sensing parts; mechanical flexibility; piezoresistive characteristics; polyimide substrate; sensor structure; Carbon nanotubes; Force; Resistance; Substrates; Tactile sensors; CNT-polymer composites; Flexibility; Piezoresistivity; Tactile sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626939

Filename

6626939