Title :
Modeling of a Precise MOS Sensor Array System for 2D Detection of Magnetic Fields
Author :
Abou-Elnour, Ali ; Abo-Elnor, Ossama ; Mohamed, E.Y. ; Ibrahim, M.M.
Author_Institution :
Fac. of Eng., Ajman Univ. of Sci. & Technol.
Abstract :
A highly sensitive linear MOS sensor system for two-dimensional detection of magnetic fields is suggested and its characteristics is systematically investigated. First, the effects of device geometric parameters and biasing conditions on the sensor sensitivity are accurately determined using an efficient physical simulator which couples the magnetic field equation and the carrier transport equations. From the simulation results, an enhanced equivalent circuit model for MOS magnetic sensor is proposed and finally the performance of an integrated smart structure which is able to fully detect the magnetic field variations in two-directions is analyzed
Keywords :
MIS devices; electric sensing devices; magnetic field effects; magnetic sensors; semiconductor device models; sensor arrays; biasing conditions; carrier transport equations; equivalent circuit model; geometric parameters; integrated smart structure; linear MOS magnetic sensor array modeling; magnetic field detection; magnetic field equation; physical simulator; sensitivity; Analytical models; Circuit simulation; Coupling circuits; Equations; Intelligent sensors; Magnetic sensors; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Solid modeling;
Conference_Titel :
Information Acquisition, 2006 IEEE International Conference on
Conference_Location :
Weihai
Print_ISBN :
1-4244-0528-9
Electronic_ISBN :
1-4244-0529-7
DOI :
10.1109/ICIA.2006.305819
