Title :
Printed micro-hotplates on flexible substrates for gas sensing
Author :
Camara, M. ; Molina-Lopez, Francisco ; Danesh, E. ; Mattana, G. ; Bontempi, A. ; Teyssieux, D. ; Thiery, L. ; Breuil, P. ; Pijolat, C. ; Persaud, K. ; Briand, Danick ; de Rooij, Nico F.
Author_Institution :
Inst. of Microeng. (IMT), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
Abstract :
We report on the design, fabrication and characterization of polymeric printed micro-hotplates for gas sensing applications. The micro-hotplates sensing platforms have been realized by inkjet-printing. The silver nanoparticles-based heater and the interdigitated electrodes were both printed with a dielectric interlayer of laminated dry photoresist between them. The devices were completed with the deposition of a polyaniline sensing layer doped with polymeric acids, which when operated at 80°C, resulted in sensitive and reliable resistive ammonia sensor fabricated on flexible foil.
Keywords :
conducting polymers; flexible electronics; gas sensors; ink jet printing; microfabrication; microsensors; nanoparticles; photoresists; silver; Ag; dielectric interlayer; flexible substrates; gas sensing applications; inkjet-printing; interdigitated electrodes; laminated dry photoresist; polymeric acids doped polyaniline sensing layer; polymeric printed microhotplates; silver nanoparticles-based heater; temperature 80 degC; Films; Gas detectors; Heating; Polymers; Substrates; Temperature sensors; Polymeric hotplates; ammonia; conducting polymers; flexible substrates; gas sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626953
