Determination of SAW phase velocities on the nanoscale

Author

Hesjedal, T. ; Chilla, E. ; Fröhlich, H.J.

Author_Institution

Paul Drude Inst. for Solid-State Electrons., Berlin, Germany

Volume

2

fYear

1996

fDate

3-6 Nov 1996

Firstpage

811

Abstract

This paper reports the first determination of the phase velocity of surface acoustic waves (SAW) on the nanometer scale. With a scanning acoustic force microscope (SAFM) a maximum lateral resolution of 19.9 nm has been achieved. This is almost two orders of magnitude better than the resolution of standard quantitative acoustic microscopy. The key of measuring the phase of high frequency signals with a slowly responding SAFM cantilever is frequency mixing at its nonlinear force curve. For demonstrating its abilities SAW dispersion was studied on Au layers of different thicknesses by SAFM over a lateral distance down to 200 nm

Keywords

acoustic dispersion; acoustic microscopy; elastic constants; gold; metallic thin films; nanotechnology; surface acoustic waves; Au; frequency mixing; high frequency signals; lateral distance; lateral resolution; nanoscale SAW phase velocities; nonlinear force curve; scanning acoustic force microscope; Acoustic measurements; Acoustic signal detection; Acoustic waves; Force measurement; Frequency; Microscopy; Nonlinear acoustics; Signal resolution; Surface acoustic waves; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE

Conference_Location

San Antonio, TX

ISSN

1051-0117

Print_ISBN

0-7803-3615-1

Type

conf

DOI

10.1109/ULTSYM.1996.584118

Filename

584118