Electroconductivity and structural-phase changes of anodic aluminum oxide implanted by titanium and molybdenum

Author

Abramov, I.I. ; Danilyuk, A.L. ; Litvinovich, G.V. ; Sokol, V.A. ; Burova, E.A. ; Uglov, V.V. ; Cherenda, N.N.

Author_Institution

Byelorussian State Univ. of Inf. & Radioelectron., Minsk, Byelorussia

fYear

1999

fDate

13-16 Sept. 1999

Firstpage

289

Lastpage

291

Abstract

Investigation results of electroconductivity and structural-phase changes in anodic aluminium oxide implanted by titanium and molybdenum ions are presented. Decrease of oxide resistance to the tens of Ohm´s, transformation of amorphous state to the crystalline state and vice versa, and morphology changes of anodic aluminium oxide were found.

Keywords

alumina; amorphisation; crystal morphology; crystallisation; electrical conductivity; ion implantation; molybdenum; solid-state phase transformations; titanium; AES; Al/sub 2/O/sub 3/:Ti,Mo; SEM; Ti/Mo implantation; XRD; amorphous/crystalline transformations; anodic Al/sub 2/O/sub 3/; electroconductivity; morphology changes; oxide resistance; structural-phase changes; Aluminum oxide; Amorphous materials; Crystallization; Electrons; Helium; IEEE catalog; Magnetic flux leakage; Organizing; Sprites (computer); Titanium;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 1999. Microwave & Telecommunication Technology. 1999 9th International Crimean [In Russian with English abstracts]

Conference_Location

Sevastopol, Crimea, Ukraine

Print_ISBN

966-572-003-1

Type

conf

DOI

10.1109/CRMICO.1999.815241

Filename

815241