Electromagnetic modeling of thin-film bulk acoustic resonators

Author

Farina, Marco ; Rozzi, Tullio

Author_Institution

Ist. di Elettromagnetismo e Bioingegneria, Universita Politecnica delle Marche, Ancona, Italy

Volume

1

fYear

2004

fDate

6-11 June 2004

Firstpage

383

Abstract

This contribution introduces a technique for the electromagnetic analysis of thin-film bulk acoustic wave resonators (FBAR). The piezoelectric/acoustic linear equations are coupled to and solved with Maxwell´s equations. For the acoustic propagation, mono-dimensional behavior is assumed, while full-wave 3D Maxwell´s equations are rigorously solved for the complete circuit. Comparison with experimental data shows very good agreement.

Keywords

Maxwell equations; acoustic resonators; bulk acoustic wave devices; computational electromagnetics; method of moments; thin film devices; Maxwell equation solving; Maxwell equations; acoustic linear equation; acoustic propagation; bulk acoustic wave devices; electromagnetic analysis; electromagnetic modeling; full-wave 3D Maxwell´s equation; method of moments; mono-dimensional behavior; piezoelectric linear equation; thin-film bulk acoustic resonators; thin-film bulk acoustic wave resonators; Acoustic propagation; Acoustic waves; Coupling circuits; Electromagnetic analysis; Electromagnetic modeling; Film bulk acoustic resonators; Maxwell equations; Piezoelectric films; Thin film circuits; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2004 IEEE MTT-S International

ISSN

0149-645X

Print_ISBN

0-7803-8331-1

Type

conf

DOI

10.1109/MWSYM.2004.1335902

Filename

1335902