Design of Temperature Compensation System of Pressure Sensors

Author

Chen, Guiyou ; Sun, Tongjing ; Wang, Pitao ; Sun, Bo

Author_Institution

Sch. of Control Sci. & Eng., Shandong Univ., Jinan

fYear

2006

fDate

20-23 Aug. 2006

Firstpage

1042

Lastpage

1046

Abstract

In order to improve the accuracy of silicon piezoresistance pressure sensor under different temperatures, temperature compensation should be carried out. A temperature compensation system of pressure sensors is presented. The structure, hardware and software design of the system are introduced. In the hardware design, MAX1452 is used as the main compensation unit. A curve fitting algorithm based on cubic B-spline is adopted in the temperature compensation software design. The accuracy and the production efficiency of the sensors are improved. The system features in low cost, high efficiency and high accuracy. And it has great spreading value

Keywords

computerised instrumentation; piezoresistive devices; pressure sensors; splines (mathematics); MAX1452 hardware; cubic B-spline algorithm; curve fitting algorithm; silicon piezoresistance pressure sensors; software design; temperature compensation system; Curve fitting; Hardware; Piezoresistance; Production; Sensor systems; Silicon; Software algorithms; Software design; Spline; Temperature sensors; MAX1452; cubic B-spline; pressure sensors; temperature compensation;

fLanguage

English

Publisher

ieee

Conference_Titel

Information Acquisition, 2006 IEEE International Conference on

Conference_Location

Weihai

Print_ISBN

1-4244-0528-9

Electronic_ISBN

1-4244-0529-7

Type

conf

DOI

10.1109/ICIA.2006.305883

Filename

4097816