Development of MEMS using biodegradable polymer material

Author

Amaya, S. ; Sugiyama, Shunsuke

Author_Institution

TOWA Corp., Kyoto, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

1322

Lastpage

1325

Abstract

This paper presents an efficient and environment friendly fabrication technology of MEMS devices using biodegradable polymer material applying hot embossing and polishing process. The robustness and capability of the method are demonstrated through the fabrication of sophisticated polylactic acid (PLA) movable microstructures. In this research, a monolithic PLA thermal microactuator has been developed as low environmental load device. All PLA thermal microactuator has been fabricated and tested successfully. The displacement was about 11 times larger than that of a Si counterpart.

Keywords

biodegradable materials; microactuators; polymers; MEMS devices; biodegradable polymer material; environment friendly fabrication technology; hot embossing process; low environmental load device; monolithic PLA thermal microactuator; polishing process; polylactic acid movable microstructures; Bonding; Embossing; Polymers; Programmable logic arrays; Silicon; Temperature measurement; Biodegradable polymer; Environment friendly; Polylactic acid; Polymer MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627020

Filename

6627020