Stanford University general purpose microelectrode fabrication process (neuroscience research application)

Microelectrode arrays have designed using standard CAD programs utilizing a construction-set approach. The microelectrode sites, interconnect metal lines, and bond pad areas are available as predefined cells that can be recombined easily to obtain various array geometries. The microelectrodes themselves are defined by choosing the appropriate opening sizes in the passivation layer over standard metal microelectrode pads. The fabrication process used for these arrays is easily implemented with standard integrated-circuit processing equipment. It can be used stand-alone to fabricate passive arrays or added to commercial integrated-circuit processes for active arrays. Microelectrode characterization and experimental results are presented.<>