Multifunctional chronic 3D electrode arrays based on a simple folding process

This paper reports our latest developments of multifunctional 3D electrode arrays using a simple and novel folding method. A new generation of devices designed for chronic animal studies has been successfully developed. These chronic devices have incorporated a variety of new features including trench-based parylene encapsulation and microchannel-supported flexible interconnections, which significantly improve the device robustness. The fabricated devices have been packaged, characterized, and implanted in the cortex of rats up to 10 weeks. Chronic neural recordings have been successfully demonstrated. Furthermore, novel flexible neural probes based on hybrid silicon-parylene structures have been demonstrated to improve long-term biocompatibility.