• DocumentCode
    3459571
  • Title

    Interrogating and manipulating at the nanometre scale — From scientific instrumentation to industrial applications

  • Author

    Staufer, Urs ; Akiyama, Toyokazu ; Gautsch, S. ; Parrat, D. ; de Rooij, Nico F. ; Imer, R.

  • Author_Institution
    Micro & Nano Eng. Lab., Delft Univ. of Technol., Delft, Netherlands
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    1488
  • Lastpage
    1492
  • Abstract
    Microfabricated instruments featuring functional elements at the nanometre scale are ideally suited to interrogate and manipulate objects in the small domain. This ability would also be attractive and open new opportunities for industrial applications. However, robustness of the instrument and their currently low throughput are considered as almost insurmountable obstacles for a successful implementation in many commercial fields. Here, scientific instrumentation in harsh, demanding environments can play a pivotal role in validating the concept and demonstrating the reliability of the instrument. This is highlighted in two examples, one in medicine and one in planetary science.
  • Keywords
    microfabrication; micromechanical devices; reliability; functional element; harsh environment; industrial application; instrument microfabrication; instrument reliability; nanometre scale; object interrogation; object manipulation; scientific instrumentation; Extraterrestrial measurements; Force; Liquids; Mars; Microscopy; Nanobioscience; Microelectromechanical Systems (MEMS); minimal invasive instruments; nanotools; scientific instrumentation; space application;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6627062
  • Filename
    6627062