DocumentCode
3459571
Title
Interrogating and manipulating at the nanometre scale — From scientific instrumentation to industrial applications
Author
Staufer, Urs ; Akiyama, Toyokazu ; Gautsch, S. ; Parrat, D. ; de Rooij, Nico F. ; Imer, R.
Author_Institution
Micro & Nano Eng. Lab., Delft Univ. of Technol., Delft, Netherlands
fYear
2013
fDate
16-20 June 2013
Firstpage
1488
Lastpage
1492
Abstract
Microfabricated instruments featuring functional elements at the nanometre scale are ideally suited to interrogate and manipulate objects in the small domain. This ability would also be attractive and open new opportunities for industrial applications. However, robustness of the instrument and their currently low throughput are considered as almost insurmountable obstacles for a successful implementation in many commercial fields. Here, scientific instrumentation in harsh, demanding environments can play a pivotal role in validating the concept and demonstrating the reliability of the instrument. This is highlighted in two examples, one in medicine and one in planetary science.
Keywords
microfabrication; micromechanical devices; reliability; functional element; harsh environment; industrial application; instrument microfabrication; instrument reliability; nanometre scale; object interrogation; object manipulation; scientific instrumentation; Extraterrestrial measurements; Force; Liquids; Mars; Microscopy; Nanobioscience; Microelectromechanical Systems (MEMS); minimal invasive instruments; nanotools; scientific instrumentation; space application;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6627062
Filename
6627062
Link To Document