MEMS high-doses radiation sensor

Author

Augustyniak, I. ; Dziuban, J. ; Knapkiewicz, P. ; Matusiak, M. ; Olszacki, M. ; Pons, P.

Author_Institution

Wroclaw Univ. of Technol., Wrocław, Poland

fYear

2013

fDate

16-20 June 2013

Firstpage

1503

Lastpage

1506

Abstract

New MEMS sensor for detection of high doses (above 10 kGy) of radiation has been presented. The sensor is made of silicon and glass in a form of anodically bonded sandwich 9 × 16 × 2.6 mm³. The sensor contains chamber with small portion of high density polyethylene (HDPE) and thin silicon membrane. Irradiation releases gaseous hydrogen, which flows from the chamber to the membrane. For known radiation dose pressure of hydrogen destroys the membrane, what is optically noticed. The sensor show good detectability of doses of radiation up to 120 kGy.

Keywords

elemental semiconductors; glass; hydrogen; microsensors; polymers; radiation effects; radiation pressure; semiconductor thin films; silicon; silicon radiation detectors; HDPE; MEMS high dose radiation sensor; Si-SiO₂; dose detectability; glass; high density polyethylene; high dose radiation detection; hydrogen releases; irradiation; membrane destruction; radiation dose pressure; thin silicon membrane; Accidents; Degradation; Glass; Hydrogen; Micromechanical devices; Radiation effects; Silicon; MEMS radiation sensor; high dose radiation; polyethylene degradation;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627066

Filename

6627066