Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers

We report on the modeling, fabrication and characterization of a new serpentine geometry for platinum bolometers realized with plasma-enhanced atomic layer deposition (PEALD). The measured responsivity of 7.5 · 10⁷ VW^-1 A^-1 of the proposed structure is almost four times higher than that of previously published PEALD deposited platinum bolometers with a traditional square absorber design [1]. This improvement was achieved without increasing the sensor´s footprint or fabrication complexity.