Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers

Author

Purkl, Fabian ; English, Timothy S. ; Yama, Gary ; Provine, J. ; Samarao, Ashwin K. ; Feyh, Ando ; Kim, Bumki ; O´Brien, Gabrielle ; Ambacher, Oliver ; Howe, R.T. ; Kenny, Thomas W.

Author_Institution

Univ. of Freiburg, Freiburg, Germany

fYear

2013

fDate

16-20 June 2013

Firstpage

1507

Lastpage

1510

Abstract

We report on the modeling, fabrication and characterization of a new serpentine geometry for platinum bolometers realized with plasma-enhanced atomic layer deposition (PEALD). The measured responsivity of 7.5 · 10⁷ VW^-1 A^-1 of the proposed structure is almost four times higher than that of previously published PEALD deposited platinum bolometers with a traditional square absorber design [1]. This improvement was achieved without increasing the sensor´s footprint or fabrication complexity.

Keywords

atomic layer deposition; bolometers; nanosensors; plasma deposition; platinum; thin film sensors; PEALD; nanometer thin platinum bolometer; plasma-enhanced atomic layer deposition; responsivity measurement; serpentine geometry; square absorber design; Absorption; Bolometers; Noise; Platinum; Resistance; Temperature measurement; Thickness measurement; Atomic Layer Deposition; Metal-based bolometer; Platinum thin film; Uncooled infrared detector;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627067

Filename

6627067