Novel microfluidic platform with through-polydimethylsiloxane microtip electrode array for on-chip cell analysis

This paper proposes a novel concept of electrical feed-through interconnect of the microfluidic platform using conductive microtip electrode array which penetrates into a microfluidic channel through polydimethylsiloxane (PDMS) thin film. As the part of this concept, high aspect ratio microtip electrode with low apex radius and PDMS channel are fabricated and assembled. The proposed scheme has been successfully verified and characterized with the cyclic voltammetry measurement of photosynthetic reaction of a green algae cell in the microfluidic channel.