Displacement enhancement of 1-axis Lorentz force actuator

This study presents the design of magnetic circuit and motion-decoupling springs to realize a Lorentz force actuator module for large displacement application. The actuating module has three merits: (1) Magnets arrangement enable the design of long metal coils on chip to introduce large in-plane Lorentz force for in-plane motion actuation, (2) Magnetic circuit design can reduce the magnetic field loss, and increase magnetic field intensity, (3) Motion decoupling springs could prevent the offset of actuator in unwanted direction during large displacement actuation. Measurements show a 40 μm displacement at 50mA input current, and the offset displacement is prevented by spring design.