Title :
Polycrystalline Silicon Field Emitter Arrays With A Gated Structure
Author :
Song, Yoon-Ho ; Lee, Jin Ho ; Kang, Sung Weon ; Yu, Byoung-Gon ; Kyoung Ik Cho ; Hyung Joun Yoo
Keywords :
Active matrix liquid crystal displays; Cathodes; Dry etching; Electrodes; Fabrication; Field emitter arrays; Glass; Resists; Silicon; Wet etching;
Conference_Titel :
Information Display, 1997., Proceedings of the Fourth Asian Symposium on
Print_ISBN :
962-8273-01-9
DOI :
10.1109/ASID.1997.631422
