DocumentCode :
3460248
Title :
Seebeck ozone sensors
Author :
Mischo, Meike ; Bitterling, M. ; Himmerlich, M. ; Krischok, S. ; Ambacher, Oliver ; Cimalla, V.
Author_Institution :
Fraunhofer Inst. for Appl. Solid State Phys., Freiburg, Germany
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
1645
Lastpage :
1648
Abstract :
A direct Seebeck ozone gas sensor is presented based on thin nanocrystalline InOx films. In this type of sensors, the Seebeck voltage is directly altered by chemisorbed gas. InOx films with intrinsic electron accumulation at the grain boundaries and surfaces enable the design of sensors at low temperatures. Additionally, ultraviolet illumination can be used to improve the response time. A packaged sensor system was realized, which is able to detect ozone concentrations as low as 10 ppb and is, thus, suitable for environmental monitoring.
Keywords :
Seebeck effect; gas sensors; indium compounds; nanostructured materials; ozone; thin films; InOx; O3; Seebeck ozone gas sensor; Seebeck voltage; chemisorbed gas; grain boundaries; intrinsic electron accumulation; packaged sensor system; thin nanocrystalline films; ultraviolet illumination; Films; Gas detectors; Gases; Temperature measurement; Temperature sensors; Voltage measurement; Gas sensor; Indium oxide; ozone; thermoelectricity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6627100
Filename :
6627100
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3460248
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