Title :
A low-power CMOS integrated sensor for CO2 detection in the percentage range
Author :
Humbert, A. ; Tuerlings, B.J. ; Hoofman, R.J.O.M. ; Tan, Zhenyu ; Gravesteijn, D. ; Pertijs, Michiel A. P. ; Bastiaansen, C.W.M. ; Soccol, D.
Author_Institution :
NXP Semicond., Leuven, Belgium
Abstract :
Within the Catrene project “PASTEUR”, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO2 concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.
Keywords :
CMOS integrated circuits; capacitive sensors; carbon compounds; gas sensors; humidity sensors; low-power electronics; CO2; CO2 detection; Catrene project PASTEUR; capacitive transduction method; low-power CMOS integrated sensor; low-power capacitance-to-digital converter; low-power capacitive carbon dioxide sensor; percentage range; relative humidity sensor; reversible behavior; short response times; temperature 293 K to 298 K; Atmosphere; Capacitance; Capacitors; Materials; Sensitivity; Sensors; Time factors; CMOS compatible; CO2 sensor; capacitive transducer; low-power sensor; multi-sensor integration;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627101
