Title :
A MEMS capacitor with improved RF power handling capability
Author :
Girbau, D. ; Otegi, N. ; Pradell, L. ; Lãzaro, A.
Author_Institution :
Dept. of Signal Theor. & Commun., Univ. Politecnica de Catalunya, Barcelona, Spain
Abstract :
This paper presents a structure of MEMS capacitor providing independence of its nominal capacity and tuning range from the applied RF signal power. The capacitor includes a third parallel plate acting as an electrode to which an extra DC voltage is applied to compensate for the self-actuation effect. This means that the device can be used in many applications working under different RF power conditions, without changing its performance - nominal capacity and tuning range. Capacitor design concept and simulations are provided. It has been manufactured using a standard surface-micromachining MEMS technology. Experimental results are presented, validating the concept and demonstrating its feasibility and advantages.
Keywords :
capacitors; micromachining; micromechanical devices; MEMS capacitor; RF signal power; capacitor design concept; self-actuation effect; standard surface micromachining; Biomembranes; Circuit optimization; Electrodes; Manufacturing; Micromechanical devices; Power capacitors; Power engineering and energy; Radio frequency; Switches; Voltage;
Conference_Titel :
Microwave Conference, 2005 European
Print_ISBN :
2-9600551-2-8
DOI :
10.1109/EUMC.2005.1610222
