مرکز منطقه ای اطلاع رساني علوم و فناوري - Applications Of Chemical-mechanical-polishing Process To Silicon Field Emitter Array

DocumentCode :

3460385

Title :

Applications Of Chemical-mechanical-polishing Process To Silicon Field Emitter Array

Author :

Lee, Jin Ho ; Song, Yoon-Ho ; Kang, Sung Weon ; Yu, Byoung Gon ; Cho, Kyoung Ik ; Lee, Sang Yun ; Yoo, Hyung Joun

fYear :

1997

fDate :

13-14 Feb 1997

Firstpage :

147

Lastpage :

148

Keywords :

Apertures; Chemical processes; Chemical technology; Dielectric materials; Electrodes; Fabrication; Field emitter arrays; Shape; Silicon; Wet etching;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Information Display, 1997., Proceedings of the Fourth Asian Symposium on

Print_ISBN :

962-8273-01-9

Type :

conf

DOI :

10.1109/ASID.1997.631423

Filename :

631423

Link To Document :