Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance

Author

Erbes, Andreja ; Thiruvenkatanathan, Pradyumna ; YAN, JIU DUN ; Seshia, Ashwin A.

Author_Institution

Eng. Dept., Univ. of Cambridge, Cambridge, UK

fYear

2013

fDate

16-20 June 2013

Firstpage

1711

Lastpage

1714

Abstract

This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its one-dimensional counterpart.

Keywords

eigenvalues and eigenfunctions; electric resistance; electrostatic devices; micromechanical resonators; springs (mechanical); transducers; vibrations; 1D open ended linear coupling scheme; coupling spring constant; cross-coupled MEMS resonator; curve veering; eigenvalue loci; electrostatic transducer; frequency 1.04 MHz; motional resistance variation; numerical simulation; vibration dynamics; Couplings; Eigenvalues and eigenfunctions; Micromechanical devices; Optical resonators; Resistance; Springs; Vibrations; Cross-coupled MEMS resonators; localized vibrations in weakly coupled MEMS; motional resistance reduction;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627116

Filename

6627116