Dielectric less capacitive MEMS switches

This paper presents the fabrication and experimental results on a capacitive switch without dielectric. Using an appropriate design of the switch, acceptable performances have been obtained with Con/Coff ratio around 10. The key advantage of this switch is that dielectric charge trapping related failure modes are eliminated. An example is shown with measured intrinsic loss less than 0.3 dB at 15 GHz and isolation better than 15 dB at the same frequency.