Title :
A Fabry-Perot refractometer for chemical vapor sensing by solid-phase microextraction
Author :
St-Gelais, Raphael ; Mackey, G. ; Saunders, John ; Zhou, J. ; Leblanc-Hotte, A. ; Poulin, Alexandre ; Barnes, Jack A. ; Loock, Hans-Peter ; Brown, R.S. ; Peter, Yves-Alain
Author_Institution :
Dept. of Eng. Phys., Ecole Polytech. de Montreal, Montréal, QC, Canada
Abstract :
The contour lithography method [1] is used to improve the fabrication yield of previously demonstrated [2] microfluidic Fabry-Perot (FP) refractive index (RI) sensors. The sensors are then coated with polydimethylsiloxane (PDMS) based polymers to detect vapor analytes by solid-phase microextraction (SPME). Preliminary characterization of devices coated with two different polymers and exposed to xylenes vapors yields a maximum sensitivity of 0.015 nm/ppm and a detection limit below 120 ppm.
Keywords :
antireflection coatings; gas sensors; lithography; micro-optomechanical devices; microfluidics; microsensors; optical fabrication; optical polymers; optical sensors; refractive index measurement; refractometers; Fabry-Perot refractometer; chemical vapor sensing; contour lithography method; microfluidic Fabry-Perot refractive index sensors; polydimethylsiloxane polymers; solid-phase microextraction; vapor analytes detection; xylenes vapors; Chemical sensors; Fabrication; Mirrors; Plastics; Sensor phenomena and characterization; Silicon; Chemical sensors; Fabry-Perot; Microfluidics; Microoptics; Optical device fabrication; Optical sensors;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031012
