Title :
DC-65 GHz characterization of nanocrystalline diamond leaky film for reliable RF MEMS switches
Author :
Chee, Joolien ; Kami, R. ; Fisher, Timothy S. ; Peroulis, Dimitrios
Author_Institution :
Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN, USA
Abstract :
This paper reports on the growth, patterning, and characterization of plasma-enhanced chemical vapor deposition (PECVD) thin diamond film for DC-65 GHz applications. Nanocrystalline films are successfully demonstrated with an average grain size of less than 60 nm that can replace conventional low-quality dielectrics in RF MEMS switches. In addition to their excellent surface properties, the diamond film has negligible RF loss up to at least 65 GHz, but non-zero DC conductivity of approximately 0.2 μS/m that allows the film to provide a conductive path for potential trapped charges. Such films are envisioned to be integrated in today´s capacitive RF MEMS switches that suffer from charge-induced stiction.
Keywords :
diamond; microswitches; microwave switches; nanoelectronics; plasma CVD; 0 to 65 GHz; PECVD thin diamond film; RF MEMS switches; charge-induced stiction; nanocrystalline diamond leaky film; plasma-enhanced chemical vapor deposition; potential trapped charges; Chemical vapor deposition; Conductive films; Dielectric thin films; Grain size; Plasma applications; Plasma chemistry; Plasma properties; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Microwave Conference, 2005 European
Print_ISBN :
2-9600551-2-8
DOI :
10.1109/EUMC.2005.1610242
