Title :
A self-temperature compensating barometer with dual doubly-clamped resonators
Author :
Luo, Z.Y. ; Li, Y.N. ; Xie, B. ; Chen, D.Y. ; Wang, J.B.
Author_Institution :
Univ. of Chinese Acad. of Sci., Beijing, China
Abstract :
This paper reports a self-temperature compensating barometer, which effectively avoided the influence of the surrounding temperature on device performance without extra temperature sensors. The micro sensor in the barometer was based on resonant mechanism. Two doubly-clamped resonators with identical sizes were fabricated on a pressure-sensitive membrane, which have reversed response to the applied pressure, while identical response to temperature. A new compensation method based on the frequencies of the two resonators was developed. With this compensation algorithm, pressure under measurement can be quantified by this device without the concern of temperature drift. Experimental results show that the accuracy of the micro device was higher than ±0.01% F.S over full atmosphere (50 kPa to 100 kPa) and temperature (-40 °C to +70 °C) range, leading to an improvement of more than 50 times than the device without temperature compensation.
Keywords :
barometers; compensation; micromechanical resonators; microsensors; pressure sensors; temperature measurement; temperature sensors; dual doubly clamped resonator; microsensor device; pressure sensitive membrane; resonant mechanism; reversed response; self-temperature compensating barometer; temperature drift; Accuracy; Pressure measurement; Pressure sensors; Resonant frequency; Temperature; Temperature measurement; Temperature sensors; Doubly-clamped resonators; Identical Temperature response; Resonant Barometer; Reversed Pressure response; Self-temperature Compensation;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180884
