A self-temperature compensating barometer with dual doubly-clamped resonators

This paper reports a self-temperature compensating barometer, which effectively avoided the influence of the surrounding temperature on device performance without extra temperature sensors. The micro sensor in the barometer was based on resonant mechanism. Two doubly-clamped resonators with identical sizes were fabricated on a pressure-sensitive membrane, which have reversed response to the applied pressure, while identical response to temperature. A new compensation method based on the frequencies of the two resonators was developed. With this compensation algorithm, pressure under measurement can be quantified by this device without the concern of temperature drift. Experimental results show that the accuracy of the micro device was higher than ±0.01% F.S over full atmosphere (50 kPa to 100 kPa) and temperature (-40 °C to +70 °C) range, leading to an improvement of more than 50 times than the device without temperature compensation.