Three-leaf trefoil-type MEMS tunable corner cube retro-reflector

Author

Yu-fan Chen ; Bing-jun Yang ; Yi-jen Lin ; Keng-hsing Chao ; Chih-Chieh Chang ; Jia-Hong Huang ; Jui-che Tsai

Author_Institution

Grad. Inst. of Photonics & Optoelectron., Nat. Taiwan Univ., Taipei, Taiwan

fYear

2011

fDate

8-11 Aug. 2011

Firstpage

181

Lastpage

182

Abstract

A three-leaf trefoil-type corner cube retro-reflector (CCR) fabricated by the MUMPs polysilicon surface micromachining process is presented. Unlike most of other MEMS CCRs, our CCR´s opening faces straight upwards, making its (1, 1, 1) direction, i.e. the direction along which the retro-reflection efficiency is maximum, perpendicular to the surface of the substrate. This architecture is more suitable for applications such as CCR-based portable, dynamic, optical identification cards. The tunability can be achieved by employing an electrostatically-actuated gap-closing mirror (0.4° tilt at 250 V) as one of the three CCR reflecting `leaves´.

Keywords

micro-optics; micromachining; micromechanical devices; mirrors; retroreflectors; MUMP; electrostatically-actuated gap-closing mirror; polysilicon surface micromachining process; retroreflection efficiency; three-leaf trefoil-type MEMS tunable corner cube retroreflector; Arrays; Latches; Measurement by laser beam; Micromachining; Mirrors; Optical device fabrication; Optical reflection; MUMPs; corner cube retro-reflector; surface micromachining;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2011 International Conference on

Conference_Location

Istanbul

ISSN

2160-5033

Print_ISBN

978-1-4577-0334-8

Type

conf

DOI

10.1109/OMEMS.2011.6031014

Filename

6031014