Ultra-compact absolute pressure sensor based on mechanical amplification coupled to a suspended piezoresistive nanogauge

Author

Deimerly, Y. ; Robert, Philippe ; Jourdan, G. ; Rey, Patrice ; Bourouina, Tarik

Author_Institution

LETI, CEA, Grenoble, France

fYear

2013

fDate

16-20 June 2013

Firstpage

1767

Lastpage

1770

Abstract

Numerous pressure sensors have been developed over the last 4 decades using piezoelectric, capacitive or piezoresistive detection. Most of them are based on a direct readout of a membrane deformation, whose area is in the order of 1 mm². In this paper, we demonstrate for the first time the concept of an ultra-compact (0.04mm²) absolute pressure sensor based on suspended nano-gauges with mechanical amplification and embedded self-test.

Keywords

capacitive sensors; gauges; nanosensors; piezoelectric devices; piezoresistive devices; pressure sensors; capacitive; embedded self-test; mechanical amplification; membrane deformation; nanogauges; piezoelectric detection; piezoresistive detection; suspended piezoresistive nanogauge; ultracompact absolute pressure sensor; Built-in self-test; Electrodes; Frequency measurement; Noise; Noise measurement; Piezoresistance; Sensitivity; Pressure sensor; mechanical amplification; piezoresistive; suspended nanogauge;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627130

Filename

6627130