Title :
Simulation-based study of a MEMS Wolter type-I X-ray telescope
Author :
Ezoe, Yuichiro ; Ishizu, Kentaro ; Moriyama, Takumi ; Ogawa, Tomomi ; Mitsuishi, Ikuyuki ; Mitsuda, Kazuhisa
Author_Institution :
Dept. of Phys., Tokyo Metropolitan Univ., Tokyo, Japan
Abstract :
Design and performance estimation of a 4-inch MEMS-based Wolter type-I X-ray telescope using numerical simulations are reported. Optics parameters are optimized to maximize an effective area in consideration of the technical feasibility.
Keywords :
LIGA; X-ray optics; astronomical telescopes; micromechanical devices; DRIE; MEMS-based Wolter type-I X-ray telescope; X-ray LIGA; X-ray optics; numerical simulation; optical parameter; space mission; Magnetosphere; Micromechanical devices; Nickel; Optics; Silicon; Telescopes; X-ray imaging; DRIE; Space mission; X-ray LIGA; X-ray optics;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031018