Title :
Piezoelectric pressure microsensor arrays
Author :
Mirshekari, G. ; Brouillette, M. ; Frechette, L.G.
Author_Institution :
Shock Wave Lab., Univ. de Sherbrooke, Sherbrooke, QC, Canada
Abstract :
Arrays of piezoelectric pressure sensors have been fabricated and tested. The sensor structure consists of a sol-gel derived PZT layer sandwiched between two platinum electrode layers, deposited on an oxidized silicon substrate. The devices were successfully used to simultaneously perform point-measurements of the amplitude, speed and direction of shock waves propagating in a shock tube.
Keywords :
lead compounds; microsensors; piezoelectric transducers; platinum; pressure sensors; sensor arrays; shock waves; sol-gel processing; Pt-PZT-Pt; electrode layer; oxidized silicon substrate; piezoelectric pressure microsensor array; point measurement; shock tube; shock wave propagatiion direction; shock wave speed; sol-gel derived layer; Electric shock; Microsensors; Sensor arrays; Shock waves; Silicon; Substrates; Piezoelectric transducers. Pressure sensors. Microsensor arrays;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627132
